Semiconductor memory device

ABSTRACT

A reference cell outputs a reference current of a data reading current of a memory cell. A trimming data in accordance with the reference current is memorized in a non-volatile memory cell. A standard current generator outputs a standard current whose current quantity is adjusted in accordance with the trimming data. A current comparator compares the standard current to the reference current. The output of the reference current from the reference cell is adjusted through a reference cell adjuster based on a result of the comparison by the current comparator.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor memory devicecomprising a current corrector and a frequency corrector.

2. Description of the Related Art

In a frequency trimming processing in conventionalvoltage/current/oscillator circuits and the like, an external device(for example, LSI tester) is used to measure a voltage, a current and afrequency, and trimming (optimizing) data for correcting a result of themeasurement to a value as close as possible to a targeted value iscalculated, and the trimming data is programmed in a non-volatilememory.

For example, when a semiconductor memory device is manufactured, thereare variations in parameters, such as a thickness of a gate oxide film,dimensions of respective parts, an impurity concentration in a diffusionregion and the like, in each manufacturing process. Accordingly, thereare variations in a standard voltage for setting optimum writing,reading and erasing potentials and other voltages. Such variations inthe manufacturing process make an actual state of the semiconductordevice different from a state of the semiconductor memory deviceoriginally expected in a designing process. In order to absorb thevariations in the manufacturing process of the semiconductor memorydevice, the trimming processing is executed in the semiconductor memorydevice so that the before-mentioned voltages can be optimized.

In the trimming processing like this, for example, with respect totrimming of the voltage, such a method has been proposed wherein it isunnecessary to provide any special examination and device for storing atrimming value become unnecessary by monitoring a voltage generated inthe LSI in an AD converter so that the trimming data is constantlygenerated was proposed.

However, the trimming data in the trimming method in which theconventional external device is used is specific random data withrespect to each chip. Therefore, in the case where a plurality of chipsis simultaneously measured by the external device, it becomes necessaryto individually control each chip when measurement/calculation/programread from the non-volatile memory is executed.

Further, according to the method proposed in the foregoing patentdocument, as the correction is necessarily executed every time when thechip is operated after the correction based on the trimming data, anadditional current is consumed correspondingly. Further, a resolvingpower in the correction is constant, and it is not possible to flexiblyselect an amount of time and resolving power demanded in the correction.

SUMMARY OF THE INVENTION

Therefore, a main object of the present invention is to provide asemiconductor memory device capable of executing a trimming processinside a chip without incurring increase of power consumption anddeterioration of a trimming accuracy

In order to achieve the foregoing object, a semiconductor memory deviceaccording to the present invention comprises:

a memory cell;

a reference cell for outputting a reference current of a data readingcurrent of the memory cell;

a non-volatile memory cell for memorizing a trimming data in accordancewith the reference current;

a standard current generator for outputting a standard current in astate where a current volume is adjusted in accordance with the trimmingdata;

a current comparator for comparing the standard current to the referencecurrent; and

a reference cell adjuster for adjusting an output of the referencecurrent from the reference cell based on a result of the comparison bythe current comparator.

According to the foregoing constitution, the current trimming value canbe calculated inside the chip and memorized in the non-volatile memorycell, and the trimming data is retrieved from the non-volatile memorycell so as to adjust the reference current only for resetting thereference cell in the case where the reference cell deteriorated due toa thermal stress or the like. As a result, the reference cell can berestored to the state before the deterioration.

A semiconductor memory device according to the present inventioncomprises:

an oscillator;

a clock comparator for comparing a clock outputted from the oscillatorto a reference clock;

a non-volatile memory cell for memorizing a result of the comparison bythe clock comparator as a trimming data; and

a frequency adjuster for adjusting a clock frequency of the oscillatorin accordance with the trimming data.

According to the foregoing constitution, the trimming data can becalculated at a high speed inside the chip and memorized it in thenon-volatile memory cell, and thereafter, the clock frequency generatedby the oscillator can be kept constantly at a certain value based on thetrimming data memorized in the non-volatile memory cell. Further, anamount of time for counting a clock number and a trimming resolvingpower can be selected in accordance with an accuracy required fortrimming the frequency.

In addition, it is possible to be constituted in a manner where thesemiconductor memory device according to the present invention furthercomprises a data corrector for correcting the trimming data inaccordance with temperature characteristics of the standard current,reference current and oscillator. As a result, the accurate trimming canbe carried out even in the case where the temperatures are different atthe time of calculating the trimming data, resetting the reference cellor using the oscillator.

According to the semiconductor memory device of the present invention asdescribed above, measurement/calculation/programming treatment in thenon-volatile memory with respect to the random trimming data specific toeach chip are carried out inside the chip. As a result, it becomesunnecessary to individually control each chip even in the case where aplurality of chips is simultaneously measured by the external device.

The trimming correction is only demanded when the reference cell isreset and becomes unnecessary in the chip operation thereafter. As aresult, the current consumption can be reduced while the trimmingprocess inside the chip being realized.

Further, the amount of time and the resolving power demanded in thecorrection can be flexibly selected. As a result, the trimmingprocessing, while it is realized inside the chip, can be achieved with ahigher accuracy.

Even in the case where it is necessary to execute the trimming at higherfrequency and with high accuracy in the trimming processing, thefrequency trimming value can be more speedily calculated and the highspeed operation/a testing time reduction can be realized.

Further, according to the present invention, the function of correctingthe temperature characteristics is provided inside the chip. Therefore,the same effect as the case where there is no temperature change can beachieved under various temperature conditions in testing processes andactual usage.

The semiconductor memory device according to the present invention iseffectively applicable as a semiconductor memory device which has aself-current trimming function, a self frequency trimming function and atemperature correcting function inside the chip, and can realize atrimming processing with a higher efficiency and accuracy.

BRIEF DESCRIPTION OF THE DRAWINGS

These and other objects as well as advantages of the invention willbecome clear by the following description of preferred embodiments ofthe invention. A number of benefits not recited in this specificationwill come to the attention of the skilled in the art upon theimplementation of the present invention.

FIG. 1 is a block diagram of a semiconductor memory device according toa preferred embodiment 1 of the present invention.

FIG. 2 is a block diagram of a semiconductor memory device according toa preferred embodiment 2 of the present invention.

FIG. 3 is a block diagram of a semiconductor memory device according toa preferred embodiment 3 of the present invention.

FIG. 4 is a block diagram of a semiconductor memory device according toa preferred embodiment 4 of the present invention.

FIG. 5 is a block diagram of a semiconductor memory device according toa preferred embodiment 5 of the present invention.

FIG. 6 is a block diagram of a semiconductor memory device according toa preferred embodiment 6 of the present invention.

FIG. 7 is a block diagram of a semiconductor memory device according toa preferred embodiment 7 of the present invention.

FIG. 8 is a block diagram of a semiconductor memory device according toa preferred embodiment 8 of the present invention.

FIG. 9 is a block diagram of a semiconductor memory device according toa preferred embodiment 9 of the present invention.

FIG. 10 is a block diagram of a semiconductor memory device according toa preferred embodiment 10 of the present invention.

FIG. 11 is a block diagram of a semiconductor memory device according toa preferred embodiment 11 of the present invention.

FIG. 12 is a block diagram of a semiconductor memory device according toa preferred embodiment 12 of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, preferred embodiments of the present invention aredescribed referring to the drawings.

Preferred Embodiment 1

FIG. 1 is a block diagram of a semiconductor memory device according toa preferred embodiment 1 of the present invention. In FIG. 1, areference numeral 100 denotes a reference cell for outputting areference current of a data reading current of a memory cell. Thereference cell 100 has a structure equal to the memory cell and therebyoutputs the reference current. 110 denotes an AD converter forconverting a current quantity of the reference cell 100 into a digitalvalue. 120 denotes a non-volatile memory cell array comprising atrimming data region other than a region used by a user and memorizingthe AD-conversion value of the current quantity in the reference cell100 as a trimming data. 120 denote of the reference cell 100 in thetrimming data region as a trimming data. 130 denotes a standard currentgenerator for generating a standard current in which the currentquantity is adjusted in accordance with the trimming data memorized inthe non-volatile memory cell array 120. 140 denotes a current comparatorfor comparing the standard current to the reference current of thereference cell 100. 150 denotes an adjustment necessary/unnecessaryjudger for judging whether or not the adjustment of the reference cell100 is necessary based on a result of the comparison by the currentcomparator 140. 160 denotes a reference cell adjuster for adjusting thereference cell 100 based on a result of the judgment by the adjustmentnecessary/unnecessary judger 150 or an external input signal from anexternal device 20. These components 100-160 are provided in a memorycore 10 that is a chip. 170 denotes a current measurement & adjustmentnecessary/unnecessary judger provided in the external device 20, thecurrent measurement & adjustment necessary/unnecessary judging unit formeasuring the reference current of the reference cell 100 and judgingwhether or not the adjustment is necessary based on the measurement.

The reference current of the reference cell 100 is transmitted to thecurrent comparator 140 or a switch 181 by switching over with the switch181. The reference current of the reference cell 100 is transmitted tothe AD converter 110 or the current measurement & adjustmentnecessary/unnecessary judging unit 170 by switching over with the switch181. A switch 183 transmits the adjustment necessary instruction fromthe adjustment necessary/unnecessary judger 150 or the adjustmentnecessary instruction from the current measurement & adjustmentnecessary/unnecessary judger 170 respectively to the reference celladjuster 160.

An operation of the semiconductor memory device with the aforementionedconstitution according to the preferred embodiment 1 is described below.

Setting of Trimming Data

First, in order to set a Vt (threshold) level of the reference cell 100to a predetermined level, the current of the reference cell 100 ismeasured in the current measurement & adjustment necessary/unnecessaryjudging unit 170 of the external device 20 (for example, LSI tester).The foregoing predetermined level is such a level that data of thememory cell can be judged to be “1” or “0” and an intermediate valuebetween the Vt level of the “1” data and the Vt level of the “0” data isset.

The current measurement & adjustment necessary/unnecessary judger 170judges whether or not the adjustment in relation to the reference cell100 is necessary in accordance with the current measurement result ofthe reference cell 100. Further, the current measurement & adjustmentnecessary/unnecessary judger 170 executes no processing with respect tothe memory core 10 when the adjustment is judged to be unnecessary, andoutputs the adjustment instruction to the reference cell adjuster 160when the adjustment is judged to be necessary.

When it is judged that the Vt level of the reference cell 100 fails toreach the predetermined level, the reference cell adjuster 160 executesthe adjustment to increase the Vt level to the reference cell 100 basedon the adjustment instruction supplied from the current measurement &adjustment necessary/unnecessary judger 170.

When the Vt level of the reference cell 100 is judged to have reachedthe predetermined level, the AD converter 110 digital-converts an amountof the reference current of the reference cell 100 and supplies thedigital value thereby obtained to the memory cell array 120 as thetrimming data. The memory cell array 120 memorizes the supplied trimmingdata. The judgment whether or not the Vt level of the reference cell 100has reached the predetermined level is made by the external device 20such as the LSI tester or the like based on comparison to an expectedvalue memorized in a an external device 20 or a microcode.

Setting of Trimming data

In the case where the Vt level of the reference cell 100 is deterioratedby a thermal stress or the like, it is necessary to reset the Vt level.An operation in resetting the Vt level is described below. The standardcurrent of the standard current generator 130 is adjusted based on thetrimming data stored in the memory cell array 120, and the amount of thereference cell of the reference cell 100 in the state where the Vt levelis deteriorated is compared to the adjusted standard current amount inthe current comparator 140.

In accordance with a result of the comparison described above, theadjustment necessary/unnecessary judger 150 judges whether or not it isnecessary to adjust the reference cell 100. When the adjustmentnecessary/unnecessary judger 150 judges that the Vt level of thereference cell 100 fails to reach the predetermined level, the referencecell adjuster 160 adjusts the Vt level memorized in the reference cell100 so as to increase it based on the judgment result.

Thereafter, until the Vt level of the reference cell 100 reaches thepredetermined level, the current comparison by the current comparator140, the judgment on the necessity of the adjustment by the adjustmentnecessary/unnecessary judger 150 and the adjustment by the referencecell adjuster 160 are repeated.

According to the semiconductor memory device thus constituted, thecurrent trimming value can be calculated inside the chip and memorizedin the memory cell array 120. Then, the trimming data is retrieved fromthe memory cell array 120 only for resetting in the case where the Vtlevel of the reference cell 100 is deteriorated due to the thermalstress or the like so as to adjust the amount of the standard currentthat is the reference basis for comparison of the reference cell 100. Asa result, the Vt level of the reference cell 100 can be restored to alevel before the deterioration.

Further, as processing such as measurement, calculation and programmingin the non-volatile memory can be carried out inside the chip, it isunnecessary for the external device 20 to individually control each chipeven when more than one chip is simultaneously measured by the externaldevice 20. As a result, testing costs including a testing time, numberof steps for developing a test program and the like can be cut down, andany human error resulting from the complication of the test program canbe reduced.

Further, the trimming correction may be performed only when thereference cell 100 is reset and becomes unnecessary in any subsequentchip operation. As a result, the current consumption can be reducedwhile the trimming processing inside the chip is realized at the sametime.

Preferred Embodiment 2

FIG. 2 is a block diagram of a semiconductor memory device according toa preferred embodiment 2 of the present invention. Any like component isprovided with the same-reference numeral as shown in FIG. 1 and is notdescribed again. In FIG. 2, 210 denotes a data corrector provided in thememory core 100 and correcting the trimming data based on a designatedtemperature inputted from outside. 220 denotes a temperature designatorprovided in the external device 20 and designating a ambient temperaturewhen the reference cell 100 is reset.

An operation of the semiconductor memory device according to thepreferred embodiment 2 thus constituted is described below. Theoperation according to the preferred embodiment 2 is basically similarto that of the preferred embodiment 1. The preferred embodiment 2 isdifferent from the preferred embodiment 1 in that the amount of thereference current of the reference cell 100 is digitally converted inthe AD converter 110 and the trimming data consisting of thedigital-value obtained is corrected in the data corrector 210 inaccordance with the designated temperature inputted from the temperaturedesignator 220.

The designated temperature inputted from the temperature designator 220is a current ambient temperature designated in each of a plurality oftemperature ranges such as a high-temperature range, anordinary-temperature range and a low-temperature range when the test isperformed in the plurality of temperature ranges in the test process.More specifically, the trimming data is memorized in the memory cellarray 120 as described in the preferred embodiment 1, and it is assumedthat the trimming data is the trimming data set in the manufacturingprocess in the ordinary-temperature range. In the case where the currenttemperature in executing the test process is in the normal-temperaturerange, the set temperature range and the ambient temperature when thetest is performed are equal to each other. Therefore, the trimming datamemorized in the memory cell array 120 is directly used to reset the Vtlevel in the case where the Vt level of the reference cell 100 betweenthe manufacturing process and the test process is deteriorated. Thetrimming data is reset according to the method described in thepreferred embodiment 1.

However, when the current ambient temperature in the test process is inthe high-temperature range in the case where the trimming data shows thevalue set in the manufacturing process in the ordinary-temperaturerange, the deterioration of the Vt level of the reference cell 100 dueto the thermal stress in the foregoing state is larger than thedeterioration in the ordinary-temperature range. When the deteriorationof the Vt level in the high-temperature range is hypothetically largerby “1” than the deterioration of the Vt level in theordinary-temperature range, the trimming data memorized in the memorycell array 120 is corrected so as to increase by +1 in the datacorrector 210. Accordingly, the Vt level is reset based on the trimmingdata increased by +1 in the high-temperature range where thedeterioration is larger by “1”. As a result, even in the case where theambient temperature when the test process is performed is in thehigh-temperature range, the Vt level prior to the deterioration can beaccurately restored in a manner similar to the case of theordinarily-temperature range.

On the contrary to the foregoing case, when the current ambienttemperature in the test process is in the low-temperature range in thecase where the trimming data shows the value set in the manufacturingprocess in the ordinary-temperature range, the deterioration of the Vtlevel of the reference cell 100 due to the thermal stress in theforegoing state is smaller than the deterioration in theordinary-temperature range. When the deterioration of the Vt level inthe low-temperature range is hypothetically smaller by “1” than thedeterioration of the Vt level in the ordinary-temperature range, thetrimming data memorized in the memory cell array 120 is corrected so asto decrease by −1 in the data corrector 210. Accordingly, the Vt levelis reset based on the trimming data decreased by −1 in thelow-temperature range where the deterioration is smaller by “1”. As aresult, in the case where the ambient temperature when the test processis performed is in the low-temperature range, the Vt level prior to thedeterioration can be accurately restored in a manner similar to the caseof the ordinarily-temperature range.

The high-temperature range, ordinary-temperature range andlow-temperature range are only examples as the temperature range set asthe ambient temperature in the test process, which is not necessarilylimited to these three temperature ranges. The manufacturing process andthe test process are also mentioned as an example, the present inventionis not necessarily limited to these processes.

As described above, when the Vt level of the reference cell 100 isreset, the standard current is adjusted based on the corrected trimmingdata, and the Vt level of the reference cell 100 is reset to thepredetermined level.

The trimming data correction in the data corrector 210 based on thedesignated temperature inputted from the temperature designator 220 canbe realized by means of either of a circuit or a software computation.For example, an adder and a subtracter are used as circuits forexecuting addition and subtraction of +1 in the high-temperature rangeand −1 in the low-temperature range, with respect to the trimming datain the ordinary-temperature range. More specifically, the trimming datain the ordinary-temperature range “0010” is corrected to “0011” in thehigh-temperature range and “0001” in the low-temperature range. In thecase of a software processing is employed, these operations are executedby means of, for example, software such as microcode.

In the semiconductor memory device thus constituted, an effect similarto that of the preferred embodiment 1 can be obtained. Further, byconstituting the semiconductor memory device so as to further comprisethe data corrector 210 for correcting the trimming data in accordancewith the temperature characteristics of the standard and referencecurrents, the trimming processing can be accurately executed even in thecase where the ambient temperature is different between when thetrimming data is calculated and when the reference cell is reset.Therefore, an effect equal to that in the case without change of thetemperature can also be obtained even under the various temperatureconditions in between the test processes and actual usage.

Preferred Embodiment 3

FIG. 3 is a block diagram of a semiconductor memory device according toa preferred embodiment 3 of the present invention. Any like component isprovided with the same reference numeral as shown in FIGS. 1 and 2 andis not described again. In FIG. 3, 310 denotes a non-volatile memorycell array for memorizing a plurality of digital values as the trimmingdata.

An operation of the semiconductor memory device according to thepreferred embodiment 3 thus constituted is described below. Theoperation according to the preferred embodiment 3 is basically similarto that of the preferred embodiment 2. The preferred embodiment 3 isdifferent from the preferred embodiment 2 in the point that a pluralityof trimming data for temperature correction is memorized in the memorycell array 310. The plurality of trimming data for temperaturecorrection means the following data. For example, it is the followingdata in the case where the test is performed at a plurality of ambienttemperatures such as the high-temperature range, ordinary-temperaturerange and low-temperature range in the test process with respect to thetrimming data memorized in the memory cell array 120 in themanufacturing process in the ordinary-temperature range as described inthe preferred embodiment 2.

-   -   data corrected in the data corrector 210 for the        high-temperature range    -   data corrected in the data corrector 210 for the        ordinary-temperature range (correction is unnecessary in the        present case)    -   data corrected in the data corrector 210 for the low-temperature        range

These corrected data are memorized in different regions of the memorycell array 310.

When the Vt level of the reference cell 100 is reset, the standardcurrent is adjusted based on optimum data of the plurality of correctedtrimming data corresponding to the current ambient temperature (forexample, when the test process is performed), and the Vt level of thereference cell 100 is reset to the predetermined level.

The optimum data denotes the data corresponding to the ambienttemperature designated by the temperature designator 220 among the datacorrected for the high-temperature range, data corrected for theordinary-temperature range and data corrected for the low-temperaturerange which are memorized in the memory cell array 310, and the relevantcorrected data is selected. The correction of the trimming data based onthe designated temperature can be realized by means of the circuit orsoftware operation in a manner similar to the preferred embodiment 2.The semiconductor memory device thus constituted can also achieve aneffect similar to that of the preferred embodiment 2.

Preferred Embodiment 4

FIG. 4 is a block diagram of a semiconductor memory device according toa preferred embodiment 4 of the present invention. Any like component isprovided with the same reference numeral as shown in FIG. 1 and is notdescribed-again. In FIG. 4, 410 denotes a data corrector provided in thememory core 10 for correcting the trimming data based on the currentambient temperature (when the test process is performed). 420 denotes atemperature detector provided in the memory core 10.

An operation of the semiconductor memory device according to thepreferred embodiment 4 thus constituted is described below. Theoperation according to the preferred embodiment 4 is basically similarto that of the preferred embodiment 1. The preferred embodiment 4 isdifferent from the preferred embodiment 1 in the point that the trimmingdata retrieved from the memory cell array 120 is corrected in the datacorrector 410 based on the current ambient temperature detected by thetemperature detector 420. More specifically, as shown in the preferredembodiment 2, for example, when the test is performed at a plurality oftemperature ranges such as the high-temperature range,ordinary-temperature range and low-temperature range in the test processwith respect to the trimming data that is memorized in the memory cellarray 120 in the manufacturing process in the ordinary-temperaturerange, the current ambient temperature in the test process is detectedin the temperature detector 420. Then, the data is corrected (addition)in response to the high-temperature range when a result of the detectionshows the high-temperature range, the data is used without anycorrection when the detection result shows the ordinary-temperaturerange, and the data is corrected (subtraction) in response to thelow-temperature range when the detection result shows thelow-temperature range.

When the Vt level of the reference cell 100 is reset, the standardcurrent is adjusted based on the corrected trimming data, and the Vtlevel of the reference cell 100 is reset to the predetermined level. Thecorrection of the trimming data based on the detected temperature can berealized by means of the circuit or software operation in a mannersimilar to the preferred embodiment 2. The semiconductor memory devicethus constituted can also achieve an effect similar to that of thepreferred embodiment 2.

Preferred Embodiment 5

FIG. 5 is a block diagram of a semiconductor memory device according toa preferred embodiment 5 of the present invention. In FIG. 5, 500denotes an oscillator. 510 denote a counter for counting a clock numberof the oscillator 500 during an arbitrary period inputted from outside.520 denotes a clock number comparator for obtaining a difference betweenthe clock number outputted from the counter 510 and the clock numberinputted from outside. 530 denotes a non-volatile memory cell array formemorizing a result of the comparison by the clock number comparator 520as the trimming data. 540 denotes a frequency adjuster for adjusting aclock frequency generated by the oscillator 500 in accordance with thetrimming data value. 550 denotes a peripheral circuit. These constituentelements 500-550 are provided in a memory core 30 that is a chip. 560denotes a sampling time designator provided in an external device 40.570 denotes a target count value designator provided in the externaldevice 40.

A switch 581 switches over to transmit the comparison result of theclock number comparator 520 to the memory cell array 530 or a switch582. The switch 582 switches over the comparison result of the clocknumber comparator 520 to the trimming data from the memory cell array530 so as to transmit the switch over data to the frequency adjuster540. Accordingly, when the comparison result of the clock numbercomparator 520 is used in real time, the data is transmitted to theclock number comparator 520, switch 581, switch 582 and frequencyadjuster 540 in the order. Further, when the comparison result of theclock number comparator 520 is temporarily memorized in the memory cellarray 530 and thereafter reused after a power supply is turned off, thedata is transmitted to the clock number comparator 520, switch 581,memory cell array 530, switch 582 and frequency adjuster 540 in theorder.

An operation of the semiconductor memory device according to thepreferred embodiment 5 thus constituted is described below. First,during a sampling period inputted from the sampling time designator 560in the external device 40, the clock number of the oscillator 500 iscounted with the counter 510. The sampling time in the counter 510 isarbitrary, and the clock number can be more accurately counted as thesampling time is extended, meanwhile the counting time can be reducedwhen the sampling period is shortened.

Next, the clock number which is the count value inputted from the targetcount value designator 570 in the external device 40 and the clocknumber which is the counting result of the counter 510 are compared toeach other in the clock number comparator 520 so that a differencebetween them is calculated, and the comparison result (difference) ismemorized as the trimming data in the memory cell array 530. The countvalue inputted from the target count value designator 570 is an originalnumber of oscillations by the oscillator 500 during the sampling timeinputted from the sampling time designator 560. More specifically, thedifference between the clock number outputted by the counter 510 and theclock number inputted from the target count value designator 570 iscalculated so that it is judged if the clock frequency generated by theoscillator 500 is adjusted as expected. For example, assuming that theclock number inputted from the target count value designator 570 is “5”,it is judged that the clock frequency generated by the oscillator 500has not reached the expected value when the clock number outputted fromthe counter 510 is “4”. As a result, the trimming data that is the datacorrected by +1 is calculated. When the clock number outputted from thecounter 510 is “6”, it is judged that the clock frequency generated bythe oscillator 500 exceeds the expected value, the trimming data whichis the data corrected by −1 is calculated.

Thereafter, the clock frequency generated by the oscillator 500 isadjusted by the frequency adjuster 540 based on the trimming data storedin the memory cell array 530 (not via the memory cell array 530 whenused in real time), and the adjusted clock frequency is used as a drivefrequency so that the peripheral circuit 570 is operated.

According to the semiconductor memory device thus constituted, thetrimming data can be calculated inside the chip and memorized in thememory cell array 530, and thereafter, the clock frequency constantlygenerated by the oscillator 500 can be kept at a certain value based onthe trimming data memorized in the memory cell array 530. Further, theamount of time for counting the clock number and the trimming resolvingpower can be selected in accordance with the required frequency trimmingaccuracy.

Further, as processing for measurement, calculation and programming inthe non-volatile memory on the random trimming data specific to eachchip can be carried out inside the chip, it becomes unnecessary toindividually control each chip even when a plurality of chips issimultaneously measured by the external device 40. Therefore, the testcosts including the testing time, the number of development steps on thetest program and the like can be reduced, and any human error can bethereby reduced even in the state where the test program is complicated.Further, the amount of time required for the correction and theresolving power can be flexibly selected. As a result, the trimmingprocessing can be achieved with an improved accuracy while the trimminginside the chip is realized at the same time.

Preferred Embodiment 6

FIG. 6 is a block diagram of a semiconductor memory device according toa preferred embodiment 6 of the present invention. Any like component isprovided with the same reference numeral as shown in FIG. 5 and is notdescribed again. In FIG. 6, 610 denotes a data corrector provided in thememory core 30 for correcting the trimming data based on the designatedtemperature inputted from outside. 620 denotes a temperature designatorprovided in the external device 40 at the time when an operation of theoscillator 500 is used. An operation of the semiconductor memory deviceaccording to the preferred embodiment 6 thus constituted is describedbelow.

The operation according to the preferred embodiment 6 is basicallysimilar that of the preferred embodiment 5. The preferred embodiment 6is different from the preferred embodiment 5 in the point that thedifference between the clock number outputted from the counter 510 andthe clock number inputted from the target count value designator 570 iscalculated in the clock number comparator 520, and thereafter, thetrimming data is corrected by the data corrector 610 in accordance withthe designated temperature inputted from the temperature designator 620.

The designated temperature inputted from the temperature designator 620and the correction implemented by the data corrector 610 based on thedesignated temperature are similar to the designated temperatureinputted from the temperature designator 220 and the correctionimplemented by the data corrector 210 based on the designatedtemperature shown in the preferred embodiment 2. When the oscillator 500is used, the clock frequency generated by the oscillator 500 is adjustedbased on the corrected trimming data, and the adjusted clock frequencyis used as the drive frequency so that the peripheral circuit 550 isoperated. The correction of the trimming data based on the designatedtemperature can be realized by means of the circuit or softwareoperation in a manner similar to the preferred embodiment 2.

According to the semiconductor memory device thus constituted, an effectsimilar to that of the preferred embodiment 5 can be obtained. Further,by constituting the semiconductor memory device so as to furthercomprise the data corrector 610 for correcting the trimming data inaccordance with the temperature characteristic of the oscillator 500,the accurate trimming processing can be executed even in the case wherethe temperature is different between when the trimming data iscalculated and when the oscillator is used. Therefore, an effect equalto the case without change of the temperature can also be obtained underthe various temperature conditions between the test processes and inactual usage.

Preferred Embodiment 7

FIG. 7 is a block diagram of a semiconductor memory device according toa preferred embodiment 7 of the present invention. Any like component isprovided with the same reference numeral as shown in FIGS. 5 and 6 andis not described again. In FIG. 7, 710 denotes a non-volatile memorycell array for memorizing a plurality of digital values as the trimmingdata.

An operation of the semiconductor memory device according to thepreferred embodiment 7 thus constituted is described below. Theoperation according to the preferred embodiment 7 is basically similarto that of the preferred embodiment 6. The preferred embodiment 7 isdifferent from the preferred embodiment 6 in the point that a pluralityof trimming data for temperature correction is memorized in the memorycell array 710. The memory cell array 710 for memorizing the pluralityof trimming data for temperature correction is similar to the memorycell array 310 according to the preferred embodiment 3. The trimmingdata includes, for example, the data corrected for the high-temperaturerange, data corrected for the ordinary-temperature range and datacorrected for the low-temperature range, and the foregoing data ismemorized in different regions of the memory cell array 710.

When the oscillator 500 is used, the clock frequency is adjusted basedon the data considered optimum among the plurality of corrected trimmingdata so that the peripheral circuit 550 is operated. The optimum datadenotes the data corresponding to the ambient temperature designated bythe temperature designator 620 among the data corrected for thehigh-temperature range, data corrected for the ordinary-temperaturerange and data corrected for the low-temperature range which arememorized in the memory cell array 710 as described in the preferredembodiment 3.

The trimming data correction based on the designated temperature can berealized by means of the circuit or software operation in a mannersimilar to the preferred embodiment 2. The semiconductor memory devicethus constituted can also obtain an effect similar to that of thepreferred embodiment 6 can be obtained.

Preferred Embodiment 8

FIG. 8 is a block diagram of a semiconductor memory device according toa preferred embodiment 8 of the present invention. Any like component isprovided with the same reference numeral as shown in FIG. 5 is notdescribed again. In FIG. 8, 810 denotes a temperature detector providedin the memory core 30, and 820 denotes a data corrector provided in thememory core 30 for correcting the trimming data based on the currentambient temperature (when the test process is performed).

An operation of the semiconductor memory device according to thepreferred embodiment 8 thus constituted is described below. Theoperation according to the preferred embodiment 8 is basically similarto that of the preferred embodiment 5. The preferred embodiment 8 isdifferent from the preferred embodiment 5 in the point that the trimmingdata retrieved from the memory cell array 530 is corrected in the datacorrector 820 based on the current (when the test process is performed)ambient temperature specified by the temperature detector 810. Morespecifically, as described in the preferred embodiment 4, for example,the trimming data memorized in the memory cell array 530 when thetrimming data in the normal-temperature range is calculated is used insuch a plurality of temperature ranges as the high-temperature range,ordinary-temperature range and low-temperature range when the oscillatoris used. In such a case, the current temperature is detected through thetemperature detector 810, and the data correction suitable for thehigh-temperature range (addition) is executed to the trimming data whenthe detected ambient temperature is in the high-temperature range. Whenthe detected ambient temperature is in the normal-temperature range, thetrimming data is directly used without any correction. When the detectedambient temperature is in the low-temperature range, the data correctionsuitable for the low-temperature range (subtraction) is executed to thetrimming data.

When the oscillator 500 is used, the clock frequency is adjusted basedon the corrected trimming data, and the peripheral circuit 550 isthereby operated. The trimming data correction based on the designatedtemperature can be realized by means of the circuit or softwareoperation in a manner similar to the preferred embodiment 2. In thesemiconductor memory device thus constituted, an effect similar to thatof the preferred embodiment 6 can also obtained.

Preferred Embodiment 9

FIG. 9 is a block diagram of a semiconductor memory device according toa preferred embodiment 9 of the present invention. In FIG. 9, areference numeral 900 denotes an oscillator. 910 denotes a phasecomparator for comparing a phase of a clock outputted from theoscillator 900 to a phase of a clock inputted from outside. 920 denotesa non-volatile memory cell array for memorizing a result of thecomparison by the phase comparator 910 as the trimming data. 930 denotesa frequency adjuster for adjusting a clock frequency generated by theoscillator 900 in accordance with the trimming data value. 940 denotes aperipheral circuit. These constituent elements 900-940 are provided in amemory core 50 that is a chip. 950 denotes a target clock generatorprovided in an external device 60.

A switch 961 performs switchover to transmit the comparison result ofthe phase comparator 910 to the memory cell array, 920 or a switch 962.The switch 962 switches over one of the comparison result of the phasecomparator 910 to the trimming data from the memory cell array 920 so asto transmit the switchover data to the frequency adjuster 930. Accordingto the functions of these switches, when the comparison result of thephase comparator 910 is used in real time, the data is transmitted tothe phase comparator 910, switch 961, switch 962 and frequency adjuster930 in the order. In the case where the comparison result of the phasecomparator 910 is temporarily memorized in the memory cell array 920 andreused after the power supply is turned off, the data is transmitted tothe phase comparator 910, switch 961, memory cell array 920, switch 962and frequency adjuster 930 in the order.

An operation of the semiconductor memory device according to thepreferred embodiment 9 thus constituted is described below. Theoperation according to the preferred embodiment 9 is basically similarthat of the preferred embodiment 5. The preferred embodiment 9 isdifferent from the preferred embodiment 5 in the point that the trimmingdata is calculated based on the comparison of the phase of the clockfrom the oscillator 900 to the clock inputted from the target clockgenerator 950 in the external device. The clock inputted from the targetclock generator 950 corresponds to an original clock number of theoscillator 900. More specifically, a difference between the clock numberoutputted by the oscillator 900 and the clock number inputted from thetarget clock generator 950 is obtained so that it is judged whether ornot the clock frequency generated by the oscillator 900 is adjusted asexpected. Assuming that the clock number inputted from the target clockgenerator 950 is “5”, for example, it is judged that the clock frequencyhas not reached the expected value yet when the clock number outputtedfrom the oscillator 900 is “4”, and the trimming data increased by +1 iscalculated. Meanwhile, when the clock number outputted by the oscillator900 is “6”, it is judged that the clock frequency has already reachedthe expected value, and the trimming data decreased by −1 is calculated.

Thereafter, based on the trimming data stored in the memory cell array920 (not via the memory cell array 920 when used in real time), thefrequency adjuster 930 adjusts the clock frequency generated by theoscillator 900, and the peripheral circuit 940 is operated based on theadjusted clock frequency used as the drive frequency.

According to the semiconductor memory device thus constituted, thetrimming data can be calculated at a high speed inside the chip andmemorized in the memory cell array 920, and thereafter, the clockfrequency constantly generated by the oscillator 900 can be kept at acertain value based on the trimming data memorized in the memory cellarray 920.

Further, as the processing of measurement, calculation and programmingin the non-volatile memory can be carried out inside the chip withrespect to the random trimming data that is specific to each chip, it isunnecessary for each chip to be individually controlled even when morethan one chip is simultaneously measured by the external device 60. As aresult, the test costs including the testing time, number of developmentsteps on the test program and the like can be cut down, and any humanerror involving the complication of the test program can be reduced.

Further, even in the case where a high frequency and a high accuracy aredemanded in the trimming processing, the trimming data can be morespeedily calculated. As a result, the operation can be accelerated, andthe testing time can be reduced.

Preferred Embodiment 10

FIG. 10 is a block diagram of a semiconductor memory device according toa preferred embodiment 10 of the present invention. Any like componentis provided with the same reference numeral as shown in FIG. 9 is notdescribed again. In FIG. 10, 1010 denotes a data corrector provided inthe memory core 50 and correcting the trimming data based on thedesignated temperature inputted from outside. 1020 denotes a temperaturedesignator at usage of the oscillator provided in the external device 60and.

An operation of the semiconductor memory device according to thepreferred embodiment 10 thus constituted is described below. Theoperation according to the preferred embodiment 10 is basically similarthat of the preferred embodiment 9. The preferred embodiment 10 isdifferent from the preferred embodiment 9 in the point that the phase ofthe clock from the oscillator 900 is compared to the phase of the clockinputted from outside in the phase comparator 910, and thereafter, thetrimming data is corrected in the data corrector 1010 in accordance withthe designated temperature inputted from the temperature designator1020.

The designated temperature inputted from the temperature designator 1020and the correction implemented by the data corrector 1010 based on thedesignated temperature are similar to the designated temperatureinputted from the temperature designator 220 and the correctionimplemented by the data corrector 210 based on the designatedtemperature described in the preferred embodiment 2.

When the oscillator 900 is used, the clock frequency is adjusted basedon the corrected trimming data, and the adjusted clock frequency is usedas the drive frequency so that the peripheral circuit 940 is operated.The trimming data correction based on the designated temperature can berealized by means of the circuit or software operation in a mannersimilar to the preferred embodiment 2. According to the semiconductormemory device thus constituted, an effect similar to that of thepreferred embodiment 9 can be obtained. Further, by constituting thesemiconductor memory device so as to further comprise the data corrector1010 for correcting the trimming data in accordance with the temperaturecharacteristic of the oscillator 900, the accurate trimming processingcan be executed even in the case where the ambient temperature isdifferent between when the trimming data is calculated and when theoscillator is used. Therefore, an effect equal to the case withoutchange of the temperature can be obtained under the various temperatureconditions between the test processes and in actual usage.

Preferred Embodiment 11

FIG. 11 is a block diagram of a semiconductor memory device according toa preferred embodiment 11 of the present invention. Any like componentis provided with the same reference numeral as shown in FIGS. 9 and 10and is not described again. In FIG. 11, 1110 denotes a non-volatilememory cell array for memorizing a plurality of digital values as thetrimming data.

An operation of the semiconductor memory device according to thepreferred embodiment 11 thus constituted is described below. Theoperation according to the preferred embodiment 11 is basically similarto that of the preferred embodiment 10. The preferred embodiment 11 isdifferent from the preferred embodiment 10 in the point that a pluralityof trimming data for temperature correction is memorized in the memorycell array 1110. The memory cell array 1110 for memorizing the pluralityof trimming data for temperature correction is similar to the memorycell array 310 according to the preferred embodiment 3. The plurality oftrimming data for the temperature correction includes, for example, thedata corrected for the high-temperature range, data corrected for theordinary-temperature range and data corrected for the low-temperaturerange, and the foregoing data is memorized in different regions of thememory cell array 1110.

When the oscillator 900 is used, the clock frequency is adjusted basedon the data considered optimum among the plurality of corrected trimmingdata so that the peripheral circuit 940 is operated based on theadjusted clock frequency used as the drive frequency. As described inthe preferred embodiment 3, the optimum data denotes the trimming datacorresponding to the ambient temperature designated by the temperaturedesignator 1020 among the trimming data corrected for thehigh-temperature range, trimming data corrected for theordinary-temperature range and trimming data corrected for thelow-temperature range which are memorized in the memory cell array 1110.

The trimming data correction based on the designated temperature can berealized by means of the circuit or software operation in a mannersimilar to the preferred embodiment 2. The semiconductor memory devicethus constituted can also obtain an effect similar to that of thepreferred embodiment 10 can be obtained.

Preferred Embodiment 12

FIG. 12 is a block diagram of a semiconductor memory device according toa preferred embodiment 12 of the present invention. Any like componentis provided with the same reference numeral as shown in FIG. 9 and it isnot described again. In FIG. 12, 1210 denotes a temperature detectorprovided in the memory core 50, and 1220 denotes a data correctorprovided in the memory core 50 for correcting the trimming data based onthe current ambient temperature.

An operation of the semiconductor memory device according to thepreferred embodiment 12 thus constituted is described below. Theoperation according to the preferred embodiment 12 is basically similarto that of the preferred embodiment 9. The preferred embodiment 12 isdifferent from the preferred embodiment 9 in the point that the trimmingdata retrieved from the memory cell array 920 is corrected in the datacorrector 1210 based on the current ambient temperature detected by thetemperature detector 1210. More specifically, as described in thepreferred embodiment 4, for example, in the case where the trimming datamemorized in the memory cell array 530 at the time of calculating thetrimming data in the normal-temperature range, is used in such aplurality of temperature ranges as the high-temperature range,ordinary-temperature range and low-temperature range when the oscillatoris used, the current ambient temperature is detected by the temperaturedetector 1210, and the data correction suitable for the high-temperaturerange (addition) is executed to the trimming data when the detectedambient temperature is in the high-temperature range. When the detectedambient temperature is in the normal-temperature range, the trimmingdata is directly used without any correction. When the detected ambienttemperature is in the high-temperature range, the data correctionsuitable for the low-temperature range (subtraction) is executed to thetrimming data.

When the oscillator 900 is used, the clock frequency generated by theoscillator 900 is adjusted based on the corrected trimming data, and theperipheral circuit 940 is operated based on the clock frequency used asthe drive frequency. The trimming data correction based on the detectedtemperature can be realized by means of the circuit or softwareoperation in a manner similar to the preferred embodiment 2. In thesemiconductor memory device thus constituted, an effect similar to thatof the preferred embodiment 10 can be obtained.

Though there the preferred embodiments of this invention has beendescribed in detail, it will be understood that various modificationsmay be made therein, and it is intended to cover in the appended claimsall such modifications as fall within the true spirit and scope of thisinvention.

1-9. (canceled)
 10. A semiconductor memory device comprising: anoscillator; a clock comparator for comparing a clock outputted from theoscillator to a reference clock; a non-volatile memory cell formemorizing a result of the comparison by the clock comparator as atrimming data; and a frequency adjuster for adjusting a clock frequencyof the oscillator in accordance with the trimming data.
 11. Thesemiconductor memory device as claimed in claim 10, wherein the clockcomparator comprising: a counter for counting a clock number of theclocks outputted by the oscillator; and a clock number comparator forcalculating a difference between the clock number outputted by thecounter and a reference clock number, wherein the non-volatile memorycell memorizes a result of the calculation by the clock numbercomparator as the trimming data.
 12. The semiconductor memory device asclaimed in claim 10, wherein the oscillator sets a drive clock of aperipheral circuit of the semiconductor memory device.
 13. Thesemiconductor memory device as claimed in claim 11, wherein thereference clock number is inputted to the semiconductor memory devicefrom outside.
 14. The semiconductor memory device as claimed in claim10, wherein the counter counts a clock number during an arbitrary periodof the oscillator, and the arbitrary period is variable.
 15. Thesemiconductor memory device as claimed in claim 10, further comprising adata corrector for correcting the trimming data in accordance with atemperature characteristic of the oscillator.
 16. The semiconductormemory device as claimed in claim 15, wherein the data correctorcorrects the trimming data in accordance with temperaturecharacteristics of a plurality of temperature ranges of the oscillator.17. The semiconductor memory device as claimed in claim 10, furthercomprising: a temperature detector for detecting an ambient temperatureof the semiconductor memory device; and a data corrector for correctingthe trimming data read from the non-volatile memory cell in accordancewith a result of the detection by the temperature detector.
 18. Thesemiconductor memory device as claimed in claim 10, wherein the clockcomparator comprises a phase comparator for comparing a phase of theclock outputted by the oscillator to a phase of the reference clock, andthe non-volatile memory cell memorizes a result of the comparison by thephase comparator as the trimming data.